The ArBlade 5000 ion milling system by Hitachi can be used to polish and thin samples, and especially to prepare cross-sections for TEM. Ar ions are accelareted with 0 to 8 kV. A dedicated microscope for sample and mask alignment is available.
In cross-section milling, the accelaration leads to milling rates of up to 1 mm per hour for Si. Cross-section milling can be performed over a large range of 8 mm facilitated by a newly developed holder design. The sample may be moved by ± 7 mm in the corresponding X and 0 to 3 mm in the corresponding Y direction.
For flat milling, typically applied to polish samples, the maximum milling area is 32 mm in diameter. The maximum rotational speed of the holder is 25 rpm.
Image gallery
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Ion milling system; Copyright: Gillian Kiliani -
Top view onto the Ar gun with reflections of the illuminating LEDs on the glass window; Copyright: Gillian Kiliani -
Mounting plate for sample holder; Copyright: Gillian Kiliani -
Microscope for sample and mask alignment; Copyright: Gillian Kiliani -
Sample holder under the alignment microscope; Copyright: Gillian Kiliani